Precise 3-Axis Motion within a Single Plane
Nanometer-Resolution Motion in One Plane
The GO XYRStage is based on the precise and robust GO Piezo Stage. It delivers smooth, continuous motion and features a self-locking capability when at rest.
The GO XYRStage can be easily controlled via the GO Controller and the GO HexMotion Windows Application. A C++ DLL is available for seamless programming integration.
Specifications：
Model | GO TIPTILTSTAGE | Model | GO XYRSTAGE |
POSITIONING | |||
Linear Travel (Z) | +10 mm | Linear Travel(X, Y) | +-10 mm |
Angular Travel Θ(X, Y) | +-3° | Angular TraveΘ(Z) | +-10° |
Minimum Incremental Motion (Z) | 2 nm | Minimum Incremental Motion (X, Y) | 2 nm |
Minimum Incremental Angular Motion Θ(X, Y) | < 0,1 µrad | Minimum Incremental Angular Motion Θ(Z) | < 0,1 µrad |
Linear Repeatability (Z) | +- 200 nm | Linear Repeatability (X, Y) | +- 200 nm |
Angular Repeatability Θ(X, Y) | +- 15 µrad | Angular Repeatability Θ(Z) | +- 15 µrad |
MOTION | |||
Running Thrust Force | (Z) 15 N (MIN.) | Running Thrust Force | (X) 10 N / (Y) 8 N (MIN.) |
Holding Force | (Z) 18 N (MIN.) | Holding Force | (X) 12 N / (Y) 10 N (MIN.) |
Maximum Speed (No Load) | 8 mm/s | Maximum Speed (No Load) (X, Y) | 8 mm/s |
Maximum Speed ( Under Load) | >5 mm/s | Maximum Speed ( Under Load) | 8 mm/s |
